Light detection device

ABSTRACT

A light detection device is disclosed. A first cell and a second cell are set in the light detection device. The first cell and the second cell are mutually adjacent. The device includes: a first semiconductor layer of a first conductivity type; a second semiconductor layer provided on the first semiconductor layer, the second semiconductor layer being of a second conductivity type; a first member provided between the first cell and the second cell; a second member provided between the first member and the first cell; and a third member provided between the first member and the second cell. The first to third members are made of a material different from the first semiconductor layer and the second semiconductor layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of application Ser. No. 16/566,480filed on Sep. 10, 2019 and is based upon and claims the benefit ofpriority from the prior Japanese Patent Application No. 2019-050629,filed on Mar. 19, 2019; the entire contents of which are incorporatedherein by reference.

FIELD

Embodiments relate to a light detection device.

BACKGROUND

Conventionally, a SiPM (Silicon Photomultiplier; a siliconphotomultiplier tube) has been developed as a light detection devicethat detects faint light, in which multiple cells are arranged, and anavalanche photodiode (APD) is provided in each cell. It is desirable toincrease the detection accuracy of such a light detection device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view showing a light detection device according to afirst embodiment;

FIG. 2 is a partially enlarged plan view showing the light detectiondevice according to the first embodiment;

FIG. 3 is a cross-sectional view along line A-A′ shown in FIG. 2;

FIG. 4 is a partially enlarged cross-sectional view showing an elementseparation region of the light detection device according to the firstembodiment;

FIG. 5 is a circuit diagram showing the light detection device accordingto the first embodiment;

FIG. 6 is a cross-sectional view showing an operation of the lightdetection device according to the first embodiment;

FIG. 7 is a cross-sectional view showing a light detection deviceaccording to a modification of the first embodiment;

FIG. 8 is a cross-sectional view showing a light detection deviceaccording to a second embodiment;

FIG. 9 is a cross-sectional view showing an operation of the lightdetection device according to the second embodiment;

FIG. 10 is a cross-sectional view showing a light detection deviceaccording to a modification of the second embodiment;

FIG. 11A is a plan view showing a light detection device according to athird embodiment;

FIG. 11B is a cross-sectional view along line B-B′ shown in FIG. 11A;

FIG. 12 is a plan view showing a light detection device according to afourth embodiment;

FIG. 13 is a plan view showing a light detection device according to afifth embodiment;

FIGS. 14A and 14B and FIGS. 15A and 15B are graphs showing simulationresults of a light reflectance of a first test example, in which ahorizontal axis is a secondary photon wavelength, and a vertical axis isa light reflectance in an element separation region; and

FIG. 16 and FIG. 17 are graphs and tables showing simulation results ofthe light reflectance of a second test example, in which a horizontalaxis is a secondary photon wavelength, and a vertical axis is a lightreflectance in an element separation region.

DETAILED DESCRIPTION

In general, according to one embodiment, a light detection device isdisclosed. A first cell and a second cell are set in the light detectiondevice. The first cell and the second cell are mutually adjacent. Thedevice includes a first semiconductor layer of a first conductivitytype; a second semiconductor layer provided on the first semiconductorlayer, the second semiconductor layer being of a second conductivitytype; a first member provided between the first cell and the secondcell, the first member being made of a material different from the firstsemiconductor layer and the second semiconductor layer; a second memberprovided between the first member and the first cell, the second memberbeing made of a material different from the first semiconductor layerand the second semiconductor layer; and a third member provided betweenthe first member and the second cell, the third member being made of amaterial different from the first semiconductor layer and the secondsemiconductor layer.

First Embodiment

A first embodiment will now be described.

FIG. 1 is a plan view showing a light detection device according to theembodiment.

FIG. 2 is a partially enlarged plan view showing the light detectiondevice according to the embodiment.

FIG. 3 is a cross-sectional view along line A-A′ shown in FIG. 2.

FIG. 4 is a partially enlarged cross-sectional view showing an elementseparation region of the light detection device according to theembodiment.

FIG. 5 is a circuit diagram showing the light detection device accordingto the embodiment.

The drawings are schematic and are abbreviated or enhanced asappropriate. The vertical:horizontal ratios, etc., of the components donot always match between the drawings. This is similar for the otherdrawings described below as well.

The light detection device 1 according to the embodiment is, forexample, a SiPM.

As shown in FIG. 1, multiple cells 100 are provided in the lightdetection device 1 according to the embodiment. For example, themultiple cells 100 are arranged in a matrix configuration. An elementseparation region 101 is provided between the cells 100. In an example,several tens to several thousands of cells 100 are provided in the lightdetection device 1. When viewed from above, the configuration of thecell 100 is a rectangle, e.g., a square; and the length of one side ofthe cell 100 is about several tens to one hundred μm. When viewed fromabove, the element separation region 101 has a lattice configurationsurrounding each of the cells 100. Two mutually-adjacent cells 100 ofthe multiple cells 100 provided in the light detection device 1 also arecalled a “cell 100 a” and a “cell 100 b.”

As shown in FIG. 2 and FIG. 3, an n⁺-type substrate 11 of then⁺-conductivity type is provided in the light detection device 1. Then⁺-type substrate 11 is, for example, a single-crystal siliconsubstrate. A p-type semiconductor layer of the p-conductivity type isprovided on the n⁺-type substrate 11. The p-type semiconductor layer 12is, for example, an epitaxial layer of silicon. The contact surfacebetween the n⁺-type substrate 11 and the p-type semiconductor layer 12is a p-n interface 10.

In the embodiment, the direction from the n⁺-type substrate 11 towardthe p-type semiconductor layer 12 is called “up” and the direction fromthe p-type semiconductor layer 12 toward the n⁺-type substrate 11 iscalled “down;” but these notations are for convenience and areindependent of the direction of gravity. “Up” and “down” also may begenerally referred to as the “vertical direction.” In the specification,“when viewed from above” means an observation along the line of sight ina direction downward from above.

A p-type region 13, a p⁻-type region 14, a p⁺-type region 15, and ap⁻-type region 16 are provided in the p-type semiconductor layer 12. Thep-type region 13, the p⁺-type region 15, and the p⁻-type region 16 areprovided only inside the cells 100 and are not provided in the elementseparation region 101. The p-type region 13 contacts the n⁺-typesubstrate 11. The p⁻-type region 14 is provided on the n⁺-type substrate11 and on the p-type region 13, covers the p-type region 13, andcontacts the n⁺-type substrate 11 and the p-type region 13. The p⁺-typeregion 15 is provided on the p⁻-type region 14, contacts the p⁻-typeregion 14, and is exposed at the upper surface of the p-typesemiconductor layer 12. The p⁻-type region 16 is provided in aframe-like configuration surrounding the p⁺-type region 15 and contactsthe p⁺-type region 15 and the p⁻-type region 14. Therefore, the n⁺-typesubstrate 11, the p-type region 13, the p⁻-type region 14, and thep⁺-type region 15 are arranged in this order upward from below at thecentral portion of the cell 100.

In the specification, the “p⁺-type” means that the conductivity type isthe p-type, and the impurity concentration is higher than that of the“p-type;” and the “p⁻-type” means that the conductivity type is thep-type, and the impurity concentration is lower than that of the“p-type.” Similarly, the “n⁺-type” means that the conductivity type isthe n-type, and the impurity concentration is higher than that of the“n-type;” and the “n⁻-type” means that the conductivity type is then-type, and the impurity concentration is lower than that of the“n-type.” The “impurity concentration” refers to the concentration ofthe impurities contributing to the conductivity of the semiconductormaterial, and refers to the effective concentration excluding thecancelled portion of the donors and the acceptors in the case where bothan impurity that forms donors and an impurity that forms acceptors areincluded in the same portion.

In the element separation region 101, an insulating film 20 is providedon the p-type semiconductor layer 12; and an n⁻-type region 19 isprovided directly under the insulating film 20. The n⁻-type region 19contacts the insulating film 20 and is separated from the n⁺-typesubstrate 11. One plate member and two plate members 22 are providedbetween the insulating film 20 and the n⁺-type substrate 11. The oneplate member 21 and the two plate members 22 are disposed between thetwo mutually-adjacent cells 100 a and cell 100 b. In the followingdescription, the plate members 21 and 22 also are generally referred toas simply the “plate members.”

The refractive index for light of the plate members is different fromthe refractive indices for light of the n⁺-type substrate 11 and thep-type semiconductor layer 12. The plate members are made of a materialdifferent from the materials of the n⁺-type substrate 11 and the p-typesemiconductor layer 12 and are made of, for example, a dielectric. Adielectric is an insulator and is a substance in which the dielectricproperty is more dominant than the conductivity. In the embodiment, forexample, the plate members are made of silicon oxide. The material ofthe plate member 21 and the material of the plate member 22 may bedifferent. An upper end 21U of the plate member 21 and an upper end 22Uof the plate member 22 contact the insulating film 20. A lower end 21Lof the plate member 21 and a lower end 22L of the plate member 22 arepositioned inside the n⁺-type substrate 11. In other words, the lowerends 21L and 22L are positioned lower than the p-n interface 10.

The plate member 21 has a lattice configuration surrounding each of themultiple cells 100. The plate member 22 has a frame-like configurationsurrounding one cell 100. The plate member 22 is disposed between theplate member 21 and the cell 100. In other words, the plate member 21further surrounds, from the outside, the multiple plate members 22respectively surrounding the multiple cells 100. Among the plate members22, the plate member 22 that surrounds the cell 100 a also is called a“plate member 22 a;” and the plate member 22 that surrounds the cell 100b also is called a “plate member 22 b.”

The plate member 22 a, the plate member 21, and the plate member 22 bare arranged periodically in a cross section including twomutually-adjacent cells 100, e.g., a cross section including the cell100 a and the cell 100 b such as that shown in FIG. 3 and FIG. 4. Twoside surfaces 21 c and 21 d of the plate member 21, two side surfaces 22c and 22 d of the plate member 22 a, and two side surfaces 22 e and 22 fof the plate member 22 b are orthogonal to an imaginary straight line201 connecting the center of the cell 100 a and the center of the cell100 b. The straight line 201 is parallel to the p-n interface 10. Thecenter of the cell 100 refers to, for example, the centroid of the cell100 when viewed from above and refers to, for example, the intersectionof diagonal lines in the case where the configuration of the cell 100 isa rectangle.

As shown in FIG. 4, the thickness of the plate member 21 is taken ast21; and the thickness of the plate member 22 is taken as t22. Thethicknesses t21 and t22 are generally referred to as the thickness t.The wavelength that is incident on the plate members is taken as λ; andthe refractive index of the plate members for light is taken as n₁. m₁is an integer of 0 or more. In such a case, the thickness tsubstantially satisfies the following Formula 1.

$\begin{matrix}{t = {\frac{m_{1}\lambda}{2n_{1}} + \frac{\lambda}{4n_{1}}}} & \left\lbrack {{Formula}\mspace{14mu} 1} \right\rbrack\end{matrix}$

When the plate members are formed of silicon oxide (SiO₂), therefractive index n₁ is 1.457. When the wavelength λ of the light is 900nm, t=308m₁+154 (nm). For example, in the case where m₁ is 0, t=154(nm). Accordingly, the thickness t is set to about 154 nm. Although itis favorable for the thickness t of the plate member to be constant, theplate member may have a tapered configuration that becomes thinnerdownward as illustrated in FIG. 6. The thickness t21 of the plate member21 and the thickness t22 of the plate member 22 may be different. Forexample, in the case where the materials of the plate member 21 and theplate member 22 are different, favorable thicknesses t are calculatedaccording to Formula 1 recited above respectively based on therefractive indices of the materials. In such a case, the value of theinteger m₁ may be different between the plate member 21 and the platemember 22.

The width of a portion 14 a of the p⁻-type region 14 between the platemember 21 and the plate member 22 is taken as d. The refractive index ofthe p⁻-type region 14 for the light described above is taken as n₂. m₂is an integer of 0 or more. In such a case, the width d substantiallysatisfies the following Formula 2.

$\begin{matrix}{d = {\frac{m_{2}\lambda}{2n_{2}} + \frac{\lambda}{4n_{2}}}} & \left\lbrack {{Formula}\mspace{14mu} 2} \right\rbrack\end{matrix}$

In the case where the p⁻-type region 14 is formed of silicon (Si), therefractive index n₂ is 3.882. When the wavelength λ of the light is 900nm, t=116m₂+58 (nm). For example, in the case where m₂ is 0, t=58 (nm).Accordingly, the width d is set to about 58 nm. Although it is favorablefor the width d to be constant, the width d becomes thicker downward inthe case where the thickness t of the plate member becomes thinnerdownward. The width d may be different for each portion 14 a of thep⁻-type regions 14. As shown in FIG. 3, a resistance member 31 that ismade of, for example, polysilicon is provided on the insulating film 20.One end portion 31 a of the resistance member 31 is connected to thep⁺-type region 15 via a contact 32, an interconnect 33, and a contact34. Another end portion 31 b of the resistance member 31 is connected toa ground potential GND via a contact 35 and an interconnect 36. Apositive power supply potential Vr is applied to the n⁺-type substrate11.

Thereby, an avalanche photodiode (APD) 37 is formed of the n⁺-typesubstrate 11 and the p-type semiconductor layer 12 in the cell 100. As aresult, as shown in FIG. 5, the resistance member 31 and the APD 37 areconnected in series in the cell 100. In the light detection device 1,the cells 100 are connected in parallel.

The operation of the light detection device according to the embodimentwill now be described.

FIG. 6 is a cross-sectional view showing the operation of the lightdetection device according to the embodiment.

As shown in FIG. 6, when the positive power supply potential Vr isapplied to the n⁺-type substrate 11 of the light detection device 1 andthe ground potential GND is applied to the p⁺-type region 15 via theresistance member 31 (referring to FIG. 3), a reverse-biased voltage isapplied to the APD 37; and a depletion layer (not illustrated) spreadswith the p-n interface 10 as a starting point.

When a photon 202 enters the cell 100 in this state, a pair of anelectron e and a hole h is generated; the electron e flows toward then⁺-type substrate 11; and the hole h flows toward the p⁺-type region 15.Thereby, a forward current flows in the APD 37; and avalanche breakdownof the APD 37 occurs. As a result, an avalanche current is generated inthe APD 37; the avalanche current flows in the resistance member 31; anda potential difference is generated between the two end portions of theresistance member 31. The light detection device 1 detects the photon202 entering the cell 100 by detecting the potential difference betweenthe two end portions of the resistance member 31.

At this time, secondary photons 203 are generated inside the cell 100 bythe recombination of electron-hole pairs generated by the avalanchebreakdown. When the secondary photons 203 are incident on the elementseparation region 101, the secondary photons 203 are reflected byinterference due to the three plate members that are arrangedperiodically, i.e., the plate member 22, the plate member 21, and theplate member 22. The transmission of the secondary photons 203 throughthe element separation region 101 can be suppressed thereby. As aresult, leakage of the secondary photons 203 generated inside one cell100 into the adjacent cell 100 through the element separation region 101can be suppressed; and crosstalk between the cells 100 can besuppressed. In other words, when the photon 202 enters only the cell 100a, the secondary photons 203 that are generated in the cell 100 a can besuppressed from entering the adjacent cell 100 b, inducing avalanchebreakdown in the cell 100 b, and causing erroneous detection of thelight. Accordingly, the detection accuracy of the light detection device1 is high.

Modification of First Embodiment

A modification of the first embodiment will now be described.

FIG. 7 is a cross-sectional view showing a light detection deviceaccording to the modification.

In the light detection device 1 a according to the modification as shownin FIG. 7, the plate members 21 and 22 do not reach the n⁺-typesubstrate 11 and are separated from the n⁺-type substrate 11. In otherwords, the lower ends 21L and 22L are positioned higher than the p-ninterface 10. However, the lower ends 21L and 22L of the plate members21 and 22 are positioned lower than the interface between the p⁻-typeregion 14 and the p⁺-type region 15.

The depletion layer that is generated when the reverse-biased voltage isapplied to the APD 37 reaches the vicinity of the interface between thep⁻-type region 14 and the p⁺-type region 15 when at a maximum.Therefore, as long as the plate members 21 and 22 extend to be lowerthan the interface between the p⁻-type region 14 and the p⁺-type region15, the effect of reflecting the secondary photons generated inside thedepletion layer is obtained. It is easy to manufacture the lightdetection device 1 a according to the modification because the platemembers 21 and 22 are shallow. Otherwise, the configuration, theoperations, and the effects of the modification are similar to those ofthe first embodiment.

Second Embodiment

A second embodiment will now be described.

FIG. 8 is a cross-sectional view showing a light detection deviceaccording to the embodiment.

As shown in FIG. 8, a p⁺-type substrate 41 of the p⁺-conductivity typeis provided in the light detection device 2 according to the embodiment.The p⁺-type substrate 41 is, for example, a single-crystal siliconsubstrate. A p⁻-type region 42 of the p⁻-conductivity type is providedon the p⁺-type substrate 41. The p⁻-type region 42 is, for example, anepitaxial layer of silicon. The p⁺-type substrate 41 and the p⁻-typeregion 42 are provided in both the cell 100 and the element separationregion 101.

In the cell 100, a p-type region 43 of the p-conductivity type isprovided on the p⁻-type region 42. A p⁻-type region 44 of thep⁻-conductivity type also is provided on the p⁻-type region 42 in theelement separation region 101. A p-type semiconductor layer 45 is formedof the p⁺-type substrate 41, the p⁻-type region 42, the p-type region43, and the p⁻-type region 44.

In the cell 100, an n⁺-type semiconductor layer 46 of then⁺-conductivity type is provided on the p-type region 43. The n⁺-typesemiconductor layer 46 contacts the p-type region 43 and the p⁻-typeregion 42. Therefore, the p⁺-type substrate 41, the p⁻-type region 42,the p-type region 43, and the n⁺-type semiconductor layer 46 arearranged in this order upward from below in the central portion of thecell 100. The interface between the n⁺-type semiconductor layer 46 andthe p-type region 43 and the interface between the n⁺-type semiconductorlayer 46 and the p⁻-type region 42 form a p-n interface 50. Thereby, inthe cell 100, an avalanche photodiode (APD) 51 is formed of the n⁺-typesemiconductor layer 46, the p-type region 43, and the p⁻-type region 42.

The insulating film 20 is provided in the element separation region 101.The p⁻-type region 44 contacts the insulating film 20. The plate members21 and 22 are provided between the p⁺-type substrate 41 and theinsulating film 20. The configurations of the plate members 21 and 22are similar to those of the first embodiment. The lower end 21L of theplate member 21 and the lower end 22L of the plate member 22 arepositioned inside the p⁺-type substrate 41. In other words, the lowerends 21L and 22L are positioned lower than the interface between thep⁺-type substrate 41 and the p⁻-type region 42.

The operation of the light detection device 2 according to theembodiment will now be described.

FIG. 9 is a cross-sectional view showing the operation of the lightdetection device according to the embodiment.

As shown in FIG. 9, when the ground potential GND is applied to thep⁺-type substrate 41 of the light detection device 2 and the positivepower supply potential Vr is applied to the n⁺-type semiconductor layer46 via the resistance member 31 (referring to FIG. 8), a reverse-biasedvoltage is applied to the APD 51; and a depletion layer (notillustrated) spreads with the p-n interface 50 as a starting point.

When the photon 202 enters the cell 100 in this state, a pair of theelectron e and the hole h is generated; the electron e flows toward then⁺-type semiconductor layer 46; and the hole h flows toward the p⁺-typesubstrate 41. Thereby, a forward current flows in the APD 51; andavalanche breakdown of the APD 51 occurs. Thereby, the light detectiondevice 2 detects the incidence of the photon 202 on the cell 100.

At this time, the secondary photons 203 are generated inside the cell100 by recombination of electron-hole pairs generated by the avalanchebreakdown. However, the position where the secondary photons 203 aregenerated is inside the depletion layer; and the depletion layer spreadswith the p-n interface 50 as a starting point; therefore, in the lightdetection device 2, the position where the secondary photons 203 aregenerated is higher than the position where the secondary photons 203are generated in the light detection device 1 according to the firstembodiment (referring to FIG. 6). The secondary photons 203 do not leakeasily into the adjacent cell 100 because the secondary photons 203 arereflected by the interference due to the plate member 22, the platemember 21, and the plate member 22 provided in the element separationregion 101. Therefore, the detection accuracy of the light detectiondevice 2 is high. Otherwise, the configuration, the operations, and theeffects of the embodiment are similar to those of the first embodiment.

Modification of Second Embodiment

A modification of the second embodiment will now be described.

FIG. 10 is a cross-sectional view showing a light detection deviceaccording to the modification.

In the light detection device 2 a according to the modification as shownin FIG. 10, the plate members 21 and 22 do not reach the p⁺-typesubstrate 41 and are separated from the p⁺-type substrate 41. However,the lower ends 21L and 22L of the plate members 21 and 22 are positionedlower than the p-n interface 50 between the p-type region 43 and then⁺-type semiconductor layer 46.

The depletion layer that is generated when the reverse bias is appliedto the APD 51 is generated with the p-n interface 50 as a startingpoint; therefore, as long as the plate members 21 and 22 extend to belower than the p-n interface 50, the effect of reflecting the secondaryphotons generated inside the depletion layer is obtained. It is easy tomanufacture the light detection device 2 a according to the modificationbecause the plate members 21 and 22 are shallow. Otherwise, theconfiguration, the operations, and the effects of the modification aresimilar to those of the second embodiment.

Third Embodiment

A third embodiment will now be described.

FIG. 11A is a plan view showing a light detection device according tothe embodiment; and FIG. 11B is a cross-sectional view along line B-B′shown in FIG. 11A.

The detailed configuration inside the cell 100 is not illustrated inFIGS. 11A and 11B.

As shown in FIGS. 11A and 11B, the light detection device 3 according tothe embodiment differs from the light detection device 1 according tothe first embodiment (referring to FIG. 1 to FIG. 6) in that twomutually-separated plate members 23 are provided instead of the platemember 21. The plate members 23 have frame-like configurations andrespectively surround the plate members 22; accordingly, the platemember 23 surrounds the cell 100 with the plate member 22 interposed.Among the plate members 23, the plate member 23 that surrounds the platemember 22 a and the cell 100 a also is called a “plate member 23 a;” andthe plate member 23 that surrounds the plate member 22 b and the cell100 b also is called a “plate member 23 b.”

The composition of the plate member 23 is substantially the same as thecomposition of the plate member 22. Also, the positions in the verticaldirection of the upper end and the lower end of the plate member 23 aresubstantially the same as the positions of the upper end and the lowerend of the plate member 22. Therefore, four plate members are disposedbetween the mutually-adjacent cells 100 in the light detection device 3.The plate member 22, the plate member 23, the plate member 23, and theplate member 22 are arranged periodically in a cross section includingtwo mutually-adjacent cells 100. For example, the plate member 22 a, theplate member 23 a, the plate member 23 b, and the plate member 22 b arearranged periodically in this order between the cell 100 a and the cell100 b.

According to the embodiment, by periodically arranging the four platemembers between the mutually-adjacent cells 100, effective interferenceof the secondary photons can be provided; and the reflection efficiencycan be increased further. As a result, the leakage of the secondaryphotons into the adjacent cell 100 can be suppressed more effectively;and the detection accuracy can be improved further. Otherwise, theconfiguration, the operations, and the effects of the embodiment aresimilar to those of the first embodiment.

Although an example is shown in the first and second embodiments inwhich three plate members are disposed between the mutually-adjacentcells 100, and an example is shown in the embodiment in which four platemembers are disposed between the mutually-adjacent cells 100, theinvention is not limited thereto; and five or more plate members may bedisposed between the mutually-adjacent cells 100. The plate members mayhave frame-like configurations or lattice configurations.

Fourth Embodiment

A fourth embodiment will now be described.

FIG. 12 is a plan view showing a light detection device according to theembodiment.

The configurations inside the cell 100 and inside the element separationregion 101 are not illustrated in FIG. 12.

In the light detection device 4 according to the embodiment as shown inFIG. 12, the configuration of the cell 100 when viewed from above is anoctagon. For example, the configuration of the cell 100 is a squarehaving beveled corners. Otherwise, the configuration, the operations,and the effects of the embodiment are similar to those of the firstembodiment.

Fifth Embodiment

A fifth embodiment will now be described.

FIG. 13 is a plan view showing a light detection device according to theembodiment.

The configurations inside the cell 100 and inside the element separationregion 101 are not illustrated in FIG. 13.

In the light detection device 5 according to the embodiment as shown inFIG. 13, the configuration of the cell 100 when viewed from above is ahexagon and is arranged in, for example, a honeycomb configuration. Theedge length per unit area of the cell 100 when viewed from above can beshortened thereby. As a result, the surface area ratio of the cell 100in the light detection device 5 can be increased; and the detectionaccuracy of the light can be improved even more. Otherwise, theconfiguration, the operations, and the effects of the embodiment aresimilar to those of the first embodiment.

Although an example is shown in the first to third embodiments describedabove in which the configuration of the cell 100 when viewed from aboveis a quadrilateral, an example is shown in the fourth embodiment inwhich the configuration of the cell 100 is an octagon, and an example isshown in the fifth embodiment in which the configuration of the cell 100is a hexagon, the configuration of the cell 100 is not limited thereto.The cell 100 can have any configuration, e.g., a polygon, a circle, oran ellipse. Any combination of the embodiments described above ispossible. For example, in a light detection device such as thatdescribed in the second embodiment in which the depletion layer isformed in the upper portion of the cell, four plate members may bedisposed between mutually-adjacent cells as described in the thirdembodiment, or planar layouts such as those described in the fourth andfifth embodiments may be employed.

The shape of the plate member is not limited to a plate shape. Forexample, the plate members may be formed by forming a recess in thesemiconductor layer and filling the recess with a dielectric. In thiscase, the shape of the recess depends on the processing conditions. Inthis case, the thickness of the plate member may become thinnerdownward. Also in such cases, the length of the plate member in thearrangement direction of the plate members, that is, the direction inwhich an imaginary straight line connecting the centers of two adjacentcells extends is defined as the thickness of the plate member.

First Test Example

A first test example will now be described.

FIGS. 14A and 14B and FIGS. 15A and 15B are graphs showing simulationresults of the light reflectance of the test example, in which thehorizontal axis is the secondary photon wavelength, and the verticalaxis is the light reflectance in the element separation region.

First, the common conditions of the simulation will be described.

The light detection device was assumed to have a configuration in whichthree or four plate members are arranged periodically as shown in FIG.4. The thickness t of the plate member was taken to be uniform betweenthe plate members and within the plate member; and the width d of thesemiconductor layer between the plate members also was taken to beuniform. The plate member was made of silicon oxide; and thesemiconductor layer was made of silicon. The refractive index n₁ ofsilicon oxide was taken to be 1.457; and the refractive index n₂ ofsilicon was taken to be 3.882.

The angle between the straight line 201 and the incident direction ofthe secondary photon 203 was taken as θ (°). The straight line 201 is astraight line orthogonal to the two side surfaces of the plate member.For each of the conditions, the solid line shows the case where thethickness t of the plate member and the width d of the portion 14 a ofthe semiconductor layer are the design values, that is, the error is 0%;the single dot-dash line shows the case of the design value +10%, thatis, the actual size being 10% larger than the design value; and thebroken line shows the case of the design value −10%, that is, the actualsize being 10% smaller than the design value.

The individual simulation conditions and results will now be described.

FIGS. 14A and 14B show the case where the thickness t of the platemember is 154 nm, the width d of the portion 14 a of the semiconductorlayer is 58 nm, and the angle θ is 0°. These values of the thickness tand the width d satisfy Formulas 1 and 2 described above when thewavelength λ of the light is 900 nm and the integers m₁ and m₂ are 0.FIG. 14A shows the case of three plate members; and FIG. 14B shows thecase of four plate members.

As shown in FIGS. 14A and 14B, for the conditions recited above, in thecase where the thickness t and the width d are the design values (0%),the reflectance was not less than 0.95 in the range where the wavelengthλ was substantially not less than 700 nm and not more than 1100 nm. Inthe case where the thickness t and the width d were the design value+10% and the design value −10% as well, for three plate members (FIG.14A), the reflectance was not less than 0.8 in the range where thewavelength λ was substantially not less than 730 nm and not more than1080 nm; and for four plate members (referring to FIG. 14B), thereflectance was not less than 0.8 in the range where the wavelength λwas substantially not less than 740 nm and not more than 1120 nm.

FIGS. 15A and 15B show the case where the thickness t of the platemember is 154 nm, the width d of the portion 14 a of the semiconductorlayer is 174 nm, and the angle θ is 0°. These values of the thickness tand the width d satisfy Formulas 1 and 2 described above when thewavelength λ of the light is 900 nm, the integer m₁ is 0, and theinteger m₂ is 1. FIG. 15A shows the case of three plate members; andFIG. 15B shows the case of four plate members.

As shown in FIGS. 15A and 15B, for the conditions recited above, in thecase where the thickness t and the width d are the design values (0%),the reflectance was not less than 0.95 in the range where the wavelengthλ was substantially not less than 770 nm and not more than 920 nm. Inthe case where the thickness t and the width d were the design value+10% and the design value −10% as well, for three plate members (FIG.15A), the reflectance was not less than 0.8 in the range where thewavelength λ was substantially not less than 790 nm and not more than950 nm; and for four plate members (referring to FIG. 15B), thereflectance was not less than 0.8 in the range where the wavelength λwas substantially not less than 790 nm and not more than 950 nm.

Thus, according to the test example, good reflectance is obtained at thecenter wavelength of the secondary photon at the vicinity of 900 nm; andit was confirmed that the transmission into the adjacent cell 100 issuppressed. In particular, in the case where the integers m₁ and m₂ are0 in Formulas 1 and 2 recited above, a high reflectance was obtained ina wide wavelength range. The dependence on the fluctuation of thedimensions also was low.

Second Test Example

A second test example will now be described.

FIG. 16 and FIG. 17 are graphs and tables showing the simulation resultsof the light reflectance of the test example, in which the horizontalaxis is the secondary photon wavelength, and the vertical axis is thelight reflectance in the element separation region.

In the test example, the thickness t of the plate member was 154 nm; thewidth d of the portion 14 a of the semiconductor layer was 58 nm; andthe angle θ was changed in the range of 0 to 45°. The other conditionsare similar to those of the first test example. FIG. 16 shows the caseof three plate members; and FIG. 17 shows the case of four platemembers.

As shown in FIG. 16 and FIG. 17, the reflectance was not less than 0.5in the wavelength range substantially not less than 650 nm and not morethan 1050 nm even when changing the angle θ of the secondary photonincident on the plate member in the range of 0 to 45°. Thus, the effectof suppressing the leakage of the secondary photons into the adjacentcell was confirmed even when the angle θ fluctuates.

According to the embodiments described above, a light detection devicehaving high detection accuracy can be realized.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the inventions. Additionally, the embodiments described abovecan be combined mutually.

What is claimed is:
 1. A light detection device, a first cell and asecond cell being set in the light detection device, the first cell andthe second cell being mutually adjacent, the light detection devicecomprising: a first semiconductor layer of a first conductivity type; asecond semiconductor layer provided on the first semiconductor layer,the second semiconductor layer being of a second conductivity type; afirst member provided between the first cell and the second cell, thefirst member being made of a material different from the firstsemiconductor layer and the second semiconductor layer; a second memberprovided between the first member and the first cell, the second memberbeing made of a material different from the first semiconductor layerand the second semiconductor layer; and a third member provided betweenthe first member and the second cell, the third member being made of amaterial different from the first semiconductor layer and the secondsemiconductor layer, a lower end of the first member, a lower end of thesecond member, and a lower end of the third member being positionedupper than a lower surface of the first semiconductor layer.
 2. Thedevice according to claim 1, wherein the lower end of the first member,the lower end of the second member, and the lower end of the thirdmember are positioned lower than an interface between the firstsemiconductor layer and the second semiconductor layer.
 3. The deviceaccording to claim 1, wherein the lower end of the first member, thelower end of the second member, and the lower end of the third memberare positioned upper than an interface between the first semiconductorlayer and the second semiconductor layer.
 4. The device according toclaim 1, wherein the first member, the second member, and the thirdmember are made of a dielectric.
 5. The device according to claim 1,wherein the first member has a lattice configuration surrounding thefirst cell and surrounding the second cell.
 6. The device according toclaim 1, wherein the second member surrounds the first cell, and thethird member surrounds the second cell.
 7. The device according to claim1, wherein the first member, the second member, and the third member arearranged periodically in a cross section including the first cell andthe second cell.
 8. The device according to claim 1, wherein two sidesurfaces of the first member, two side surfaces of the second member,and two side surfaces of the third member are orthogonal to a straightline connecting a center of the first cell and a center of the secondcell.
 9. The device according to claim 1, wherein the secondsemiconductor layer includes: a first region contacting the firstsemiconductor layer; a second region provided on the first region, animpurity concentration of the second region being lower than an impurityconcentration of the first region; and a third region provided on thesecond region, an impurity concentration of the third region beinghigher than an impurity concentration of the second region, and a lowerend of the first member, a lower end of the second member, and a lowerend of the third member are positioned lower than an interface betweenthe second region and the third region.
 10. The device according toclaim 9, wherein in a case that a width of a portion of the secondsemiconductor layer between the first member and the second member and awidth of a portion of the second semiconductor layer between the firstmember and the third member are taken as d respectively, a refractiveindex of the second semiconductor layer for light entering the firstcell or the second cell is taken as n₂, m₂ is an integer of 0 or more,the width d satisfies the following Formula.$d = {\frac{m_{2}\lambda}{2n_{2}} + \frac{\lambda}{4n_{2}}}$
 11. Thedevice according to claim 1, further comprising resistance membersconnected to the first semiconductor layer or the second semiconductorlayer respectively for the first cell and the second cell.
 12. Thedevice according to claim 1, wherein in a case that a thickness of thefirst member, a thickness of the second member and a thickness of thethird member in a cross section including the first cell and the secondcell are taken respectively as t, a wavelength of light entering thefirst member is taken as λ, a refractive index of the first member forthe light is taken as n₁, and m₁ is an integer of 0 or more, thethickness t satisfies the following Formula.$t = {\frac{m_{1}\lambda}{2n_{1}} + \frac{\lambda}{4n_{1}}}$
 13. A lightdetection device, a first cell and a second cell being set in the lightdetection device, the first cell and the second cell being mutuallyadjacent, the light detection device comprising: a first semiconductorlayer of a first conductivity type; a second semiconductor layerprovided on the first semiconductor layer, the second semiconductorlayer being of a second conductivity type; a first member providedbetween the first cell and the second cell, the first member having alattice configuration surrounding the first cell and surrounding thesecond cell when viewed from above, the first member being made of amaterial different from the first semiconductor layer and the secondsemiconductor layer; a second member provided between the first memberand the first cell, the second member being made of a material differentfrom the first semiconductor layer and the second semiconductor layer;and a third member provided between the first member and the secondcell, the third member being made of a material different from the firstsemiconductor layer and the second semiconductor layer.
 14. The deviceaccording to claim 13, wherein the second member surrounds the firstcell when viewed from above, and the third member surrounds the secondcell when viewed from above.
 15. A light detection device, a first celland a second cell being set in the light detection device, the firstcell and the second cell being mutually adjacent, the light detectiondevice comprising: a first semiconductor layer of a first conductivitytype; a second semiconductor layer provided on the first semiconductorlayer, the second semiconductor layer being of a second conductivitytype; a first member provided between the first cell and the secondcell, the first member being made of a material different from the firstsemiconductor layer and the second semiconductor layer; a second memberprovided between the first member and the first cell, the second memberbeing made of a material different from the first semiconductor layerand the second semiconductor layer; and a third member provided betweenthe first member and the second cell, the third member being made of amaterial different from the first semiconductor layer and the secondsemiconductor layer, the first semiconductor layer including: a firstregion; a second region provided on the first region, an impurityconcentration of the second region being lower than an impurityconcentration of the first region; and a third region contacting thesecond semiconductor layer, being provided on the second region, andhaving an impurity concentration higher than the impurity concentrationof the second region, a lower end of the first member, a lower end ofthe second member, and a lower end of the third member being positionedlower than an interface between the third region and the secondsemiconductor layer.
 16. The device according to claim 15, wherein thelower end of the first member, the lower end of the second member, andthe lower end of the third member are positioned lower than an interfacebetween the first region and the second region.
 17. The device accordingto claim 15, wherein the lower end of the first member, the lower end ofthe second member, and the lower end of the third member are positionedupper than an interface between the first region and the second region.18. The device according to claim 15, wherein in a case that a width ofa portion of the first semiconductor layer between the first member andthe second member and a width of a portion of the first semiconductorlayer between the first member and the third member are taken as drespectively, a refractive index of the first semiconductor layer forlight entering the first cell or the second cell is taken as n₂, m₂ isan integer of 0 or more, the width d satisfies the following Formula.$d = {\frac{m_{2}\lambda}{2n_{2}} + \frac{\lambda}{4n_{2}}}$
 19. Thedevice according to claim 15, wherein in a case that a thickness of thefirst member, a thickness of the second member and a thickness of thethird member in a cross section including the first cell and the secondcell are taken respectively as t, a wavelength of light entering thefirst member is taken as λ, a refractive index of the first member forthe light is taken as n₁, and m₁ is an integer of 0 or more, thethickness t satisfies the following Formula.$t = {\frac{m_{1}\lambda}{2n_{1}} + \frac{\lambda}{4n_{1}}}$
 20. Thedevice according to claim 15, further comprising a fourth memberprovided between the first member and the third member, the fourthmember being made of a material different from the first semiconductorlayer and the second semiconductor layer.
 21. The device according toclaim 20, wherein the fourth member surrounds the second cell.
 22. Thedevice according to claim 15, further comprising resistance membersconnected to the first semiconductor layer or the second semiconductorlayer respectively for the first cell and the second cell.
 23. Thedevice according to claim 15, wherein the first member, the secondmember and the third member have respectively a tapered configurationthat becomes thinner downward in a cross section including the firstcell and the second cell.